Foundry-Compatible Micromechanical Beams for Zero Static Power Reconfigurable Tuning of Silicon Microring Resonators

Published/Posted: May 20, 2026

Authors: A. Tahsin; R. Kudalippalliyalil; T. E. Murphy; K. E. Grutter

DOI: 10.1364/CLEO_SI.2026.SW2B.2

Abstract: We present SOI foundry-compatible, switchable, and nonvolatile micromechanical beams for post-fabrication tuning of microresonator-based photonic integrated circuits. Utilizing mechanical bistability, these devices provide an energy-efficient, passive, and digital approach for aligning optical resonances to target wavelengths.

Citation:
A. Tahsin, R. Kudalippalliyalil, T. E. Murphy and K. E. Grutter, "Foundry-Compatible Micromechanical Beams for Zero Static Power Reconfigurable Tuning of Silicon Microring Resonators", Conference on Lasers and Electrooptics (CLEO) Charlotte, NC (USA) SW2B.2 (2026)
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