Published/Posted: May 15, 2022

Authors: Radhakrishnan, Sumi; Chakraborty, Trisha; Murphy, Thomas E.; Grutter, Karen E.

DOI: 10.1364/CLEO_SI.2022.STh5F.5

Abstract: We demonstrate an AlN piezo-opto-mechanical slot-mode resonator excited using a radio-frequency electrode hovering above the chip, with a 1550-nm optical mode coupling to multiple mechanical modes over broad frequency span (4.5 MHz - 3.8 GHz).

S. Radhakrishnan, T. Chakraborty, T. E. Murphy and K. E. Grutter, "Aluminum Nitride Slot-mode Piezo-Optomechanical Crystals", Conference on Lasers and Electrooptics (CLEO), San Jose, CA (USA) STh5F.5 (2022)